I te 5 o Mei, i te wā ā-rohe, i te Huinga Mātauranga SID, i whakapuaki a Chen Faxiang, he tohunga hangarau i Visionox, i tētahi whaikōrero matua, ā, i kī ia kua ārahi a Visionox i te whakarewatanga o tētahi otinga whakaputa papatipu mō te hangarau waikura katoa ALD (Atomic Layer Deposition) nekenekehanga-teitei.

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Mā te whakamahi i te tukanga ALD, kua panaia e Visionox te nekenekehanga kotahi-kēti o ngā TFT waikura-katoa ki tua atu i te 50 cm²/V·s, ā, kua angitu te whakakaha i tētahi panera waikura-katoa 6.39-inihi. E whakaatu ana te manatoko kua tutuki i te hangarau ngā whakaritenga mahi i te tīmatanga i roto i te tika o te hanga kiriata, te pumau me te ōritetanga, ka hangaia he ara hou mō ngā papa OLED e whakataurite ana i te mahi teitei, te whai huatanga o te tukanga me te tauine rahi-katoa.

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Neke atu i te 50 cm²/V·s te Nekehanga;

Ka Wetekina e ALD te Taumata Mahi-Tiketike mō te Hangarau Waikura-Katoa

I roto i te pūnaha hangarau papa-muri OLED o nāianei, kua roa te mana o te LTPS i te ara mahi-teitei nā tōna nekehanga pai ake. Heoi, e tino whakawhirinaki ana ki te tukanga Excimer Laser Annealing (ELA), e uru ana ki ngā tukanga uaua me ngā utu nui. He pai ngā otinga waikura tuku iho i roto i te ōritetanga o te rohe whānui engari he iti te nekehanga, e whakawhāiti ana i tō rātou whakamahinga mai i ngā tono utu nui. Ko te whakaurunga o te tukanga ALD e tuku ana i tētahi otinga hou ki tēnei wero ahumahi roa.

Ko te ALD he hangarau whakatakoto kiriata paparanga-i-te-paparanga. He rerekē ki te PVD tikanga (Te Whakatakotoranga Vapor Tinana), e whakatakoto ana i ngā rauemi ki roto i te paninga papatipu kotahi, ka whakatipuhia e te ALD ngā kiriata angiangi kotahi te paparanga ngota i ia wā me te mana tino pai i ia taahiraa. Nō reira, he matotoru tika, he tohatoha ōrite, he pumau tino pai hoki ngā kiriata angiangi i hangaia e te ALD, e whakatakoto ana i te turanga rauemi pakari mō ngā TFT waikura mahi-teitei.

Mō ngā papa whakaata, ko te nekehanga o te kaikawe he inenga matua o te kaha taraiwa TFT, e pā tika ana ki te tere urupare pika, te pai o te utu me te mahi taraiwa i roto i ngā horopaki taumira teitei. Mā te whakamahi i te tukanga ALD, kua tutuki i a Visionox te nekehanga kotahi-kēti neke atu i te 50 cm²/V·s me te nekehanga rua-kēti neke atu i te 80 cm²/V·s mō ngā TFT waikura katoa, e eke ana ki ngā taumata o te ao. Ko te tikanga o tēnei he nui te kaha taraiwa o ngā papa whakaata waikura katoa mō ngā tono iti-rahi teitei. Ka haere tonu a Visionox ki te whakatairanga i te hanga papatipu o tēnei hangarau i te wāhanga e whai ake nei.

He mea nui ake, ka tukuna e tēnei hangarau waikura-katoa te taraiwa mahi teitei me te kore he tukanga ELA uaua, ka whakangāwari ake i ngā rerengamahi hanga me te whakapai ake i te whai huatanga o te whakaputa.

Whakahou Tere, Ngā Papa Whaiti, Te Iti o te Whakamahinga Mana — Ka Whakarei Ake te Whakahoutanga Mahi i te Wheako Whakaaturanga

Ko te whakapai ake i te nekenekehanga ka hua ake he whakapainga tūturu ki te wheako whakaaturanga a te kaiwhakamahi.

Tuatahi, he tere whakahou ake. I te whakamahinga tūturu, me whakahou ake ngā pika i ia anga i roto i te wā poto rawa. Mā te kaha o te taraiwa taputapu ka tere ake te urupare pika, ka tautoko i ngā tirohanga maeneene i ngā tere whakahou teitei.

Tuarua, he whaiti ake ngā anga me te ōwehenga mata-ki-tinana teitei ake. Mā te kaha taraiwa kaha ake, ka taea te whakaiti ake i ngā ara iahiko pika me te pupuri tonu i te kounga whakaaturanga ōrite, me te iti ake o te wāhi tahora e nohoia ana, me te āhei hoki ki te hoahoa hanganga kiato ake. Ehara i te mea ka arotau noa i te hoahoa ahumahi o ngā taputapu mutunga, engari ka tautoko hoki i ngā whakaaturanga he nui ake te kiato pika.

Hei tāpiritanga, ka taea e te hangarau te whakaatu pumau i ngā tere whakahou iti. Mō ngā āhuatanga ahua tūtatari me te ahua tūmau e hiahia ana kia roa te pupuri i te anga, ka pai ake te pupuri i ngā āhua pika mā te mahi whakapai ake i te taputapu, ka whakaiti i te kimo o te mata me te rerekētanga o te kanapa — ka tutuki ngā tirohanga pumau me te whakaiti i te whakapaunga hiko.

Te Paewhiri Iti Tuatahi kua Whakakāhia — Te Whakawhanui i ngā Rohe Taupānga o te Hangarau Waikura Katoa

I runga i ngā whanaketanga mahi, kua angitu a Visionox ki te whakakā i tētahi papa iti-waikura mō te wā tuatahi. I mua, i te mea he iti te nekehanga, ko ngā papa tuara waikura katoa i whakamahia ki ngā whakaaturanga rahi-waenga. Ko te whakahohenga angitu o te papa iti-rahi e tohu ana kua rite tēnei ara hangarau mō ngā tono utu nui, me te tautuhi anō i ngā rohe tono o ngā papa tuara waikura.

Mā te manatoko e whakaū kua tutuki te otinga ALD i ngā whakaritenga whakaputa papatipu i roto i ngā tohu tukanga matua: te rerekētanga o te matotoru o te kiriata wafer-ki-wafer i raro i te 2% me te ōritetanga o te matotoru o te kiriata i roto i te 4%. E whakaatu ana tēnei i te pumau me te auautanga tino pai i roto i te hanga papatipu, e tutuki katoa ana i ngā paerewa ōrite o te hanga panera. I tēnei wā, kua oti te manatoko o te hangarau i runga i te raina whakaputa 4.5G, ā, ka taea te whakawhanui ki ngā whare hanga o te whakatupuranga teitei ake.

Mā te pupuri i te wairua o te "hihiri, te maia, me te kaha ki te auaha", e whakamahi ana a Visionox i te tata ki te 30 tau o te wheako kohikohi hangarau me te ahumahi hei whakatika i ngā arai matua e aukati ana i te whanaketanga o te ahumahi. Ka tutuki i te hangarau ALD all-oxide teitei-nekehanga ngā whakapainga mahi i roto i te pūnaha waikura kotahi, me te kore e whakawhirinaki ki ngā huinga maha-rauemi matatini. He mahi teitei, he pai te tukanga me te tauine rahi-katoa, kua rite ki te noho hei huarahi hangarau matua mō te whanaketanga OLED a meake nei, me te tuku uara nui ake i roto i te whakataetae hangarau whakaaturanga hou.