Pa Meyi 5, pa nthawi yakumaloko, ku SID Academic Forum, Chen Faxiang, katswiri waukadaulo ku Visionox, adapereka nkhani yayikulu yomwe adaitanidwa ndipo adalengeza kuti Visionox yatsogolera pakuyambitsa njira yopangira zinthu zambiri yaukadaulo wa ALD (Atomic Layer Deposition) all-oxide.

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Pogwiritsa ntchito njira ya ALD, Visionox yapititsa patsogolo kuyenda kwa ma TFT a all-oxide kupitirira 50 cm²/V·s ndipo yagwiritsa ntchito bwino gulu la 6.39-inch all-oxide. Kutsimikizira kukuwonetsa kuti ukadaulowu poyamba unakwaniritsa zofunikira pakuchita bwino popanga filimu molondola, kukhazikika komanso kufanana, ndikupanga njira yatsopano ya ma backplanes a OLED omwe amalinganiza magwiridwe antchito apamwamba, magwiridwe antchito abwino komanso kukula kwakukulu.

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Kuyenda Kupitirira 50 cm²/V·s;

ALD Yatsegula Denga Labwino Kwambiri la Ukadaulo Wonse wa Oxide

Mu ukadaulo wa OLED backplane womwe ulipo, LTPS yakhala ikulamulira njira yogwira ntchito bwino kwambiri chifukwa cha kuyenda kwake kwapamwamba. Komabe, imadalira kwambiri njira ya Excimer Laser Annealing (ELA), yomwe imaphatikizapo njira zovuta komanso ndalama zambiri. Mayankho achikhalidwe a oxide amapambana kwambiri m'malo akuluakulu koma amalepheretsedwa ndi kuyenda kochepa, zomwe zimalepheretsa kugwiritsa ntchito kwawo kuchokera ku ntchito zapamwamba kwambiri. Kuyambitsidwa kwa njira ya ALD kumapereka yankho latsopano ku vuto lakale lamakampanili.

ALD kwenikweni ndi ukadaulo woyika filimu wosanjikiza ndi wosanjikiza. Mosiyana ndi PVD yachikhalidwe (Physical Npor Deposition), yomwe imayika zinthu mu chophimba chimodzi chokulirapo, ALD imakulitsa mafilimu opyapyala osanjikiza atomu imodzi nthawi imodzi ndi kulamulira bwino kwambiri pa sitepe iliyonse. Zotsatira zake, mafilimu opyapyala opangidwa ndi ALD amakhala ndi makulidwe enieni, kufalikira kofanana komanso kukhazikika kwapadera, ndikuyika maziko olimba a ma TFT a oxide opambana kwambiri.

Pa ma backplanes owonetsera, kuyenda kwa carrier ndi muyeso waukulu wa mphamvu yoyendetsa ya TFT, zomwe zimakhudza mwachindunji liwiro la pixel response, mphamvu yochaja komanso magwiridwe antchito oyendetsa m'malo owoneka bwino kwambiri. Potsatira njira ya ALD, Visionox yakwanitsa kuyenda kwa single-gate mobility yoposa 50 cm²/V·s ndi kuyenda kwa dual-gate mobility kopitilira 80 cm²/V·s kwa ma all-oxide TFTs, kufika pamlingo wotsogola padziko lonse lapansi. Izi zikutanthauza kuti ma all-oxide backplanes tsopano ali ndi mphamvu yokwanira yoyendetsera ntchito zazing'ono zapamwamba. Visionox ipitiliza kupititsa patsogolo kupanga kwaukadaulo uwu mu gawo lotsatira.

Chofunika kwambiri, ukadaulo uwu wa oxide umapereka kuyendetsa bwino kwambiri popanda njira zovuta za ELA, zomwe zimapangitsa kuti ntchito zopangira zinthu zikhale zosavuta komanso kukonza bwino ntchito zopangira.

Kutsitsimutsa Mwachangu, Ma Bezels Ocheperako, Kugwiritsa Ntchito Mphamvu Kochepa — Kukweza Magwiridwe Antchito Kumakweza Chidziwitso Chowonetsera

Kuyenda bwino kwa zinthu kumatanthauza kusintha kwakukulu pakuwonetsa kwa ogwiritsa ntchito.

Choyamba, kuchuluka kwa zotsitsimutsa. Pakugwiritsa ntchito kwenikweni, chimango chilichonse chimafuna kuti ma pixel atsitsimutse mkati mwa nthawi yochepa kwambiri. Kutha kuyendetsa bwino chipangizocho kumathandiza kuti ma pixel ayankhe mwachangu, zomwe zimathandiza kuti zithunzi zosalala ziwonekere mosavuta pamlingo wapamwamba wotsitsimutsa.

Chachiwiri, ma bezel opapatiza komanso chiŵerengero chapamwamba cha sikirini ndi thupi. Ndi mphamvu yoyendetsa bwino, ma pixel circuits amatha kuchepetsedwa kwambiri pamene akusunga mawonekedwe ofanana, kutenga malo ochepa okonzera ndikulola kapangidwe kakang'ono kwambiri. Izi sizimangowonjezera kapangidwe ka mafakitale a zida zomaliza, komanso zimathandizira zowonetsera zokhala ndi kuchuluka kwa ma pixel.

Kuphatikiza apo, ukadaulowu umathandiza kuti chiwonetsero chikhale chokhazikika pamlingo wotsika wotsitsimula. Pa mawonekedwe oimirira komanso zithunzi zosasinthasintha zomwe zimafuna kusunga chimango kwa nthawi yayitali, magwiridwe antchito a chipangizochi amasunga bwino momwe ma pixel alili, amachepetsa kuthwanima kwa chinsalu ndi kusinthasintha kwa kuwala — zomwe zimapangitsa kuti zithunzi zizikhala zokhazikika pamene zimachepetsa kugwiritsa ntchito mphamvu.

Panel Yoyamba Yaing'ono Yoyendetsedwa — Malire Okulitsa Kugwiritsa Ntchito kwa Ukadaulo Wonse wa Oxide

Pogwiritsira ntchito njira zatsopano zogwirira ntchito, Visionox yakhala ikugwiritsa ntchito bwino gulu laling'ono la oxide kwa nthawi yoyamba. Poyamba, chifukwa cha kuyenda kochepa, ma backplanes a oxide ankagwiritsidwa ntchito makamaka pa ma screens apakatikati. Kugwira bwino ntchito kwa gulu laling'ono kumasonyeza kuti njira yaukadaulo iyi tsopano yakonzeka kugwiritsidwa ntchito pamtengo wapamwamba kwambiri, zomwe zimasinthanso malire a ma backplanes a oxide.

Kutsimikizira kumatsimikizira kuti yankho la ALD lakwaniritsa zofunikira pakupanga zinthu zambiri m'zisonyezero zazikulu za njira: kusinthasintha kwa makulidwe a filimu ya wafer-to-wafer pansi pa 2% ndi kufanana kwa makulidwe a filimu mkati mwa 4%. Izi zikuwonetsa kukhazikika kwakukulu ndi kubwerezabwereza popanga zinthu zambiri, zomwe zikukwaniritsa miyezo yokhazikika yopangira mapanelo. Pakadali pano, ukadaulo wamaliza kutsimikizira mzere wopanga wa 4.5G ndipo ukhoza kukulitsidwa kuzinthu zamakono.

Pochirikiza mzimu wa "kufunitsitsa, kulimba mtima komanso kuthekera kupanga zatsopano", Visionox imagwiritsa ntchito zaka pafupifupi 30 zaukadaulo wosonkhanitsa ndi kukulitsa mafakitale kuti ithane ndi zovuta zazikulu zomwe zimalepheretsa chitukuko cha mafakitale. Ukadaulo wa ALD all-oxide woyenda kwambiri umakwaniritsa kukweza magwiridwe antchito mkati mwa dongosolo limodzi la oxide, popanda kudalira kuphatikiza zinthu zambiri zovuta. Pokhala ndi magwiridwe antchito apamwamba, magwiridwe antchito apamwamba komanso kufalikira kwakukulu, ikukonzekera kukhala njira yofunika kwambiri yaukadaulo pakukula kwa OLED mtsogolo ndikupereka phindu lalikulu pampikisano watsopano waukadaulo wowonetsera.